Electrical and Optical Properties of Multi-Layered (ITO/Ag/ITO)n Transparent Conductive Films Grown onto PET Substrates

被引：3
|
作者：
Jung, Sang Kooun [1 ]
Sohn, Sang Ho [1 ]
机构：
[1] Kyungpook Natl Univ, Dept Phys, Taegu 702701, South Korea
来源：
MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 2009年 / 513卷
关键词：
Ag; electrical; indium tin oxide; optical; sheet resistance; sputtering;
D O I：
10.1080/15421400903217066
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Transparent conductive films having the sandwich structure of indium tin oxide/silver/indium tin oxide (ITO/Ag/ITO) and indium tin oxide/silver/indium tin oxide/silver/indium tin oxide (ITO/Ag/ITO/Ag/ITO) were grown onto PET substrates by a radio frequency magnetron sputtering method at the room temperature. The electrical and optical properties of the ITO/Ag/ITO films were compared with those of ITO/Ag/ITO/Ag/ITO films. Under optimal deposition conditions, thin films of ITO/Ag/ITO/Ag/ITO with a sheet resistance of 10.8 Omega/gamma and an optical transmittance of over 60% in the visible spectrum range and an optical reflectance of under 20% in the visible spectrum range were achieved. This work provides better initial understanding of the relationship between sputter process conditions and their influence on electrical and mechanical performance.
引用
收藏
页码：301 / 310
页数：10
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