MEMS CORNER-CUBE TRANSMISSION-TYPE OPTICAL PHASE MODULATOR IN DRIE TECHNOLOGY

被引：0
|
作者：
Khalil, Kamal [1 ]
Hassan, Khaled [2 ]
Shebl, Ahmed [2 ]
Soliman, Mostafa [2 ]
Eltagoury, Yomna M. [1 ]
Al-Otaibi, Mohammed [3 ]
Sabry, Yasser M. [1 ,2 ]
Khalil, Diaa [1 ,2 ,3 ]
机构：
[1] Ain Shams Univ, Cairo, Egypt
[2] Si Ware Syst, Cairo, Egypt
[3] King Abdulaziz City Sci & Technol, Jeddah, Saudi Arabia
来源：
2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2014年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work we report an in-line, transmission-type corner-cube optical Phase Modulator (PM) fabricated by DRIE technology on an SOI substrate. The PM has a resonance frequency of 11.2 kHz and a maximum travel range of 5.5 mu m. The structure is tested using single-mode fibers in a Mach-Zehnder interferometer configuration at the wavelength of 1550 nm demonstrating the capability of producing both low and high modulation indices by varying the applied voltage.
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页码：151 / 152
页数：2
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