MEMS CORNER-CUBE TRANSMISSION-TYPE OPTICAL PHASE MODULATOR IN DRIE TECHNOLOGY

被引：0

作者：

Khalil, Kamal ^{[1
]}

Hassan, Khaled ^{[2
]}

Shebl, Ahmed ^{[2
]}

Soliman, Mostafa ^{[2
]}

Eltagoury, Yomna M. ^{[1
]}

Al-Otaibi, Mohammed ^{[3
]}

Sabry, Yasser M. ^{[1
,2
]}

Khalil, Diaa ^{[1
,2
,3
]}

机构：

[1] Ain Shams Univ, Cairo, Egypt

[2] Si Ware Syst, Cairo, Egypt

[3] King Abdulaziz City Sci & Technol, Jeddah, Saudi Arabia

来源：

2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2014年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work we report an in-line, transmission-type corner-cube optical Phase Modulator (PM) fabricated by DRIE technology on an SOI substrate. The PM has a resonance frequency of 11.2 kHz and a maximum travel range of 5.5 mu m. The structure is tested using single-mode fibers in a Mach-Zehnder interferometer configuration at the wavelength of 1550 nm demonstrating the capability of producing both low and high modulation indices by varying the applied voltage.

引用

页码：151 / 152

页数：2

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