White-light interference microscopy: minimization of spurious diffraction effects by geometric phase-shifting

被引：19
|
作者：
Roy, Maitreyee [1 ]
Schmit, Joanna [2 ]
Hariharan, Parameswaran [1 ]
机构：
[1] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia
[2] Veeco Instruments Inc, Tucson, AZ 85711 USA
来源：
OPTICS EXPRESS | 2009年 / 17卷 / 06期
关键词：
STEPPING INTERFEROMETRY; PROFILOMETRY; ALGORITHM; ORDER;
D O I：
10.1364/OE.17.004495
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A common problem when profiling surfaces with steps or discontinuities using white-light (coherence-probe) interferometry is localized spikes (batwings) or spurious peaks due to diffraction effects. We show that errors due to these effects can be minimized by processing the irradiance data obtained with an achromatic phase-shifter operating on the geometric (Pancharatnam) phase to yield the values of the surface height. (C) 2009 Optical Society of America
引用
收藏
页码：4495 / 4499
页数：5
相关论文
共 50 条
  • [41] Ultrahigh-resolution OCT using white-light interference microscopy
    Dubois, A
    Vabre, L
    Lecaque, R
    Boccara, AC
    COHERENCE DOMAIN OPTICAL METHODS AND OPTICAL COHERENCE TOMOGRAPHY IN BIOMEDICINE VII, 2003, 4956 : 14 - 21
  • [42] Polarization Phase-shifting Interference Microscopy for Ultra-precision Surface Topography
    Cheng, W.
    Chen, X.
    Zhou, L.
    Liu, X.
    6TH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2010, 7544
  • [43] Phase shifting by a rotating polarizer in white-light interferometry for surface profiling
    Helen, SS
    Kothiyal, MP
    Sirohi, RS
    JOURNAL OF MODERN OPTICS, 1999, 46 (06) : 993 - 1001
  • [44] WHITE-LIGHT DIFFRACTION PATTERNS OF AMPLITUDE AND PHASE ZONE PLATES
    HIGNETTE, O
    SANTAMARIA, J
    BESCOS, J
    JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE, 1979, 10 (05): : 231 - 238
  • [45] An application of white light profilometry using geometric phase shifting
    Baldi, A
    Bertolino, F
    Ginesu, F
    Lera, M
    INTERFEROMETRY IN SPECKLE LIGHT: THEORY AND APPLICATIONS, 2000, : 453 - 460
  • [46] Five-step phase-shifting white-light interferometry for the measurement of fiber optic extrinsic Fabry-Perot interferometers
    Gao, Hongchun
    Jiang, Yi
    Zhang, Liuchao
    Jiang, Lan
    APPLIED OPTICS, 2018, 57 (05) : 1168 - 1173
  • [47] Absolute Measurement of Dynamic Low-Finesse Fabry-Perot Cavity Using Phase-Shifting White-Light Interferometry
    Liu, Qiang
    Jing, Zhenguo
    Liu, Yueying
    Li, Ang
    Xia, Zhenjie
    Peng, Wei
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2021, 39 (12) : 3926 - 3931
  • [48] Study on Phase Shifting Algorithm and System of White Light Interference
    Deng, Linjuan
    Fu, Yunxia
    Cai, Xiaoyu
    Li, Yuan
    Lei, Lihua
    Zhao, Dong
    ENGINEERING SOLUTIONS FOR MANUFACTURING PROCESSES IV, PTS 1 AND 2, 2014, 889-890 : 749 - +
  • [49] Fast phase reconstruction in white light diffraction phase microscopy
    Pham, Hoa V.
    Edwards, Christopher
    Goddard, Lynford L.
    Popescu, Gabriel
    APPLIED OPTICS, 2013, 52 (01) : A97 - A101
  • [50] Gap-matching algorithm with the impCEEMDAN in scanning white-light interference microscopy
    Sang, Mei
    Du, Xiangyu
    Wang, Shuang
    Xu, Tianhua
    Dong, Jie
    Liu, Tiegen
    OPTICS EXPRESS, 2020, 28 (10): : 15101 - 15111
12345