White-light interference microscopy: minimization of spurious diffraction effects by geometric phase-shifting

被引：19

作者：

Roy, Maitreyee ^{[1
]}

Schmit, Joanna ^{[2
]}

Hariharan, Parameswaran ^{[1
]}

机构：

[1] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia

[2] Veeco Instruments Inc, Tucson, AZ 85711 USA

来源：

OPTICS EXPRESS | 2009年 / 17卷 / 06期

关键词：

STEPPING INTERFEROMETRY; PROFILOMETRY; ALGORITHM; ORDER;

D O I：

10.1364/OE.17.004495

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A common problem when profiling surfaces with steps or discontinuities using white-light (coherence-probe) interferometry is localized spikes (batwings) or spurious peaks due to diffraction effects. We show that errors due to these effects can be minimized by processing the irradiance data obtained with an achromatic phase-shifter operating on the geometric (Pancharatnam) phase to yield the values of the surface height. (C) 2009 Optical Society of America

引用

页码：4495 / 4499

页数：5

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