Thermocapillary convection during floating-zone silicon growth with a uniform or non-uniform magnetic field

被引:26
|
作者
Morthland, TE
Walker, JS
机构
[1] Dept. of Mech. and Indust. Eng., University of Illinois, Urbana
基金
美国国家科学基金会;
关键词
D O I
10.1016/0022-0248(95)00457-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Numerical solutions are presented for the thermocapillary convection during the floating-zone growth of silicon crystals with a steady, externally applied magnetic field. Three floating-zone shapes are treated: the ''barrel shape'' corresponding to growth in microgravity, the ''bottle shape'' corresponding to terrestrial growth without an induction coil, and a ''necked shape'' corresponding to growth with a radio-frequency induction coil. The magnetic field is either uniform and axial, or it is non-uniform and axisymmetric. Two non-uniform fields are considered. The results for the bottle shape with a uniform magnetic field help explain recent experimental results presented by Croll et al. [J. Crystal Growth 137 (1994) 95]. The results for the non-uniform fields show how the radial dopant non-uniformities in these experimental results can be avoided. The results for the barrel shape and for both uniform and non-uniform magnetic fields point to the benefits of combining microgravity and a magnetic field.
引用
收藏
页码:471 / 479
页数:9
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