[1] Shanghai Univ, Sch Automat & Mech Engn, SMIT Ctr, Shanghai 200072, Peoples R China
[2] Shanghai Univ, Key State Lab New Displays & Syst Applicat, Shanghai 200072, Peoples R China
[3] Huangshan Univ, Sch Mech & Elect Engn, Huangshan 245041, Peoples R China
[4] Chalmers Univ Technol, Dept Microtechnol & Nanosci, S-41296 Gothenburg, Sweden
[5] SHT Smart High Tech AB, S-41133 Gothenburg, Sweden