Inverted p-down Design for High-Speed Photodetectors

被引：12

作者：

Nada, Masahiro ^{[1
]}

Nakajima, Fumito ^{[2
]}

Yoshimatsu, Toshihide ^{[1
]}

Nakanishi, Yasuhiko ^{[1
]}

Kanda, Atsushi ^{[1
]}

Shindo, Takahiko ^{[1
]}

Tatsumi, Shoko ^{[1
]}

Matsuzaki, Hideaki ^{[2
]}

Sano, Kimikazu ^{[1
]}

机构：

[1] NTT Corp, NTT Device Innovat Ctr, Atsugi, Kanagawa 2430198, Japan

[2] NTT Corp, NTT Device Technol Labs, Atsugi, Kanagawa 2430198, Japan

来源：

PHOTONICS | 2021年 / 8卷 / 02期

关键词：

avalanche photodiode; photodiode; vertical illumination structure;

D O I：

10.3390/photonics8020039

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We discuss the structural consideration of high-speed photodetectors used for optical communications, focusing on vertical illumination photodetectors suitable for device fabrication and optical coupling. We fabricate an avalanche photodiode that can handle 100-Gbit/s four-level pulse-amplitude modulation (50 Gbaud) signals, and pin photodiodes for 100-Gbaud operation; both are fabricated with our unique inverted p-side down (p-down) design.

引用

页码：1 / 9

页数：9

共 50 条

[1] HIGH-SPEED PHOTODETECTORS
ANDERSON, LK
MCMURTRY, BJ
APPLIED OPTICS, 1966, 5 (10) : 1573 - +
[2] HIGH-SPEED PHOTODETECTORS
ANDERSON, LK
MCMURTRY, BJ
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (10): : 1335 - +
[3] Lateral Scalability of Inverted p-down InAlAs/InGaAs Avalanche Photodiode
Nada, Masahiro
Yokoyama, Haruki
Muramoto, Yoshifumi
Ishibashi, Tadao
Kodama, Satoshi
2012 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS (IPRM), 2013, : 215 - 218
[4] Practically implementable high-sensitivity 10-Gbit/s avalanche photodiode using inverted p-down design
Nada, Masahiro
Chen, Ming-chen
Katsurai, Hiroaki
Nakanishi, Yasuhiko
Yoshimatsu, Toshihide
Kanda, Atsushi
Nakamura, Hirotaka
Sano, Kimikazu
IEICE ELECTRONICS EXPRESS, 2021, 18 (11):
[5] Triple-mesa Avalanche Photodiode With Inverted P-Down Structure for Reliability and Stability
Nada, Masahiro
Muramoto, Yoshifumi
Yokoyama, Haruki
Ishibashi, Tadao
Matsuzaki, Hideaki
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2014, 32 (08) : 1543 - 1548
[6] High-power high-speed photodetectors - Design, analysis, and experimental demonstration
Lin, LY
Wu, MC
Itoh, T
Vang, TA
Muller, RE
Sivco, DL
Cho, AY
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1997, 45 (08) : 1320 - 1331
[7] Measurements of high-speed MSM photodetectors
Paszkiewicz, B
Tomaska, M
Krnac, M
Kovac, J
Szreter, M
Boratynski, B
MIKON-2000, VOLS 1 & 2, PROCEEDINGS, 2000, : 711 - 714
[8] A TCAD methodology for high-speed photodetectors
Jacob, B
Witzigmann, B
Klemenc, M
Petit, C
SOLID-STATE ELECTRONICS, 2005, 49 (06) : 1002 - 1008
[9] High-Speed Photodetectors for Microwave Photonics
Sun, Keye
Beling, Andreas
APPLIED SCIENCES-BASEL, 2019, 9 (04):
[10] Characterization of High-Speed Balanced Photodetectors
Struszewski, Paul
Bieler, Mark
Humphreys, David
Bao, Hualong
Peccianti, Marco
Pasquazi, Alessia
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2017, 66 (06) : 1613 - 1620

← 1 2 3 4 5 →