Thermal compensated pull-in voltage MEMS inclinometers

被引：2
|
作者：
Alves, F. S. [1 ]
Dias, R. A. [1 ,2 ]
Cabral, J. [1 ]
Gaspar, J. [2 ]
Rocha, L. A. [1 ,2 ]
机构：
[1] Univ Minho, ALGORITMI CTR, Campus Azurem, Guimaraes, Portugal
[2] Int Iberian Nanotechnol Lab, INL, Braga, Portugal
来源：
28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) | 2014年 / 87卷
关键词：
Inclinometer; MEMS; Pull-in voltage; Thermal compensation;
D O I：
10.1016/j.proeng.2014.11.281
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The study of temperature effects on pull-in voltage-based inclinometers is reported here. A 751 mu degrees-resolution MEMS inclinometer that uses pull-in voltages as the transduction mechanism is tested at different temperatures and inclinations. The microstructures used have differential actuation electrodes enabling the measurement of two pull-in voltages that change with acceleration. Both the difference between left and right pull-in voltages (used to measure the inclination) and the nominal pull-in voltage (in absence of inclination) are retrieved and used for thermal compensation. Experimental results demonstrate a compensated inclinometer with high-resolution and with thermal stability better than 0.01%FS. (C) 2014 Published by Elsevier Ltd.
引用
收藏
页码：831 / 834
页数：4
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