Investigation of the dynamics of microdevices - as a design tool

When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS [1]. In this work, a relatively simple approach is presented for the study of the dynamics of microdevices. The theoretical derivation of the equations of motion is based on the Newton-Euler approach and provides a matrix form that is convenient to integrate. The dynamical model combined with models for electrostatic actuation and squeeze film effects [2] is verified by comparison with experimental results: the decaying motion of a microresonator due to an electrostatic impulse. Good agreement between simulation and measurements is shown. The pull-in angle and voltage are simulated and compared to theoretical calculations that were presented by the authors [3]. Finally, the model is used for parametric study of the influence of geometrical variations on the dynamics of a microgyroscope.