A Sensitivity-Enhanced Electric Field Sensor with Electrostatic Field Bias

被引：0
|
作者：
Wu, Xiaoming [1 ]
Huang, Jing'ao [1 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
2017 IEEE SENSORS | 2017年
基金：
北京市自然科学基金;
关键词：
electric field sensor; electrostatic field bias; electret; piezoelectric;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An electrostatic field biased cantilever electric field sensor with sensitivity improvement is proposed in this paper. Theoretically, the sensitivity of the sensor is proportional to the applied electrostatic field strength. A demonstrated sensor is developed, which consists of a Silicon cantilever coated with an Aluminum Nitride (AlN) piezoelectric film for signal readout, and a PTFE electret layer for electrostatic field bias. When the surface potential of the electret layer is -683 V, the sensitivity of the cantilever electric field sensor reaches 15.8 mV/(kV/m), and the resolution is about 20 V/m.
引用
收藏
页码：798 / 800
页数：3
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