A Sensitivity-Enhanced Electric Field Sensor with Electrostatic Field Bias

被引：0
|
作者：
Wu, Xiaoming [1 ]
Huang, Jing'ao [1 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
2017 IEEE SENSORS | 2017年
基金：
北京市自然科学基金;
关键词：
electric field sensor; electrostatic field bias; electret; piezoelectric;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An electrostatic field biased cantilever electric field sensor with sensitivity improvement is proposed in this paper. Theoretically, the sensitivity of the sensor is proportional to the applied electrostatic field strength. A demonstrated sensor is developed, which consists of a Silicon cantilever coated with an Aluminum Nitride (AlN) piezoelectric film for signal readout, and a PTFE electret layer for electrostatic field bias. When the surface potential of the electret layer is -683 V, the sensitivity of the cantilever electric field sensor reaches 15.8 mV/(kV/m), and the resolution is about 20 V/m.
引用
收藏
页码：798 / 800
页数：3
相关论文
共 50 条
  • [1] A sensitivity-enhanced field-effect chiral sensor
    Torsi, Luisa
    Farinola, Gianluca M.
    Marinelli, Francesco
    Tanese, M. Cristina
    Hassan Omar, Omar
    Valli, Ludovico
    Babudri, Francesco
    Palmisano, Francesco
    Zambonin, P. Giorgio
    Naso, Francesco
    NATURE MATERIALS, 2008, 7 (05) : 412 - 417
  • [2] A sensitivity-enhanced field-effect chiral sensor
    Luisa Torsi
    Gianluca M. Farinola
    Francesco Marinelli
    M. Cristina Tanese
    Omar Hassan Omar
    Ludovico Valli
    Francesco Babudri
    Francesco Palmisano
    P. Giorgio Zambonin
    Francesco Naso
    Nature Materials, 2008, 7 : 412 - 417
  • [3] A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology
    Gao, Yahao
    Peng, Simin
    Liu, Xiangming
    Liu, Yufei
    Zhang, Wei
    Peng, Chunrong
    Xia, Shanhong
    MICROMACHINES, 2024, 15 (03)
  • [4] A novel high-sensitivity electrostatic biased electric field sensor
    Huang, Jing'ao
    Wu, Xiaoming
    Wang, Xiaohong
    Yan, Xiaojun
    Lin, Liwei
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (09)
  • [5] Design of a Sensitivity-Enhanced Optical Fiber Magnetic Field Sensor Based on Magnetostrictive Composite
    Zhang, Shuo
    Liu, Jianben
    Peng, Jun
    Jia, Shuhai
    Bian, Jiaming
    OPTICAL FIBER SENSORS AND COMMUNICATION (AOPC 2019), 2019, 11340
  • [6] Magnetic flux leakage detection based on a sensitivity-enhanced fiber Bragg grating magnetic field sensor
    Qin, Qiyong
    Zhu, Wenhua
    Xi, Beihang
    Yang, Tao
    Wang, Ruohui
    Qiao, Xueguang
    APPLIED OPTICS, 2023, 62 (16) : E62 - E69
  • [7] Enhanced Chemical and Biological Sensor Based on Liquid Crystal Using a Bias Electric Field
    Zou, Yang
    Namkung, Jun
    Lin, Yongbin
    Ke, Dan
    Lindquist, Robert
    2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS), 2010,
  • [8] Sensitivity enhancements to photonic electric field sensor
    Sriram, SS
    Kingsley, SA
    ENABLING PHOTONIC TECHNOLOGIES FOR AEROSPACE APPLICATIONS VI, 2004, 5435 : 143 - 152
  • [9] MEASURING OF MICROWAVE ELECTRIC FIELD SENSOR SENSITIVITY
    Zhuravlev, A. A.
    Volkhin, I. L.
    Kotelnikov, E. A.
    2014 24TH INTERNATIONAL CRIMEAN CONFERENCE MICROWAVE & TELECOMMUNICATION TECHNOLOGY (CRIMICO), 2014, : 902 - 903
  • [10] Improvements in electric field sensor sensitivity by exploiting a tangential field configuration
    Chadderdon, Spencer
    Woodard, Leeland
    Perry, Daniel
    Selfridge, Richard
    Schultz, Stephen
    SMART SENSOR PHENOMENA, TECHNOLOGY, NETWORKS, AND SYSTEMS INTEGRATION 2013, 2013, 8693
12345