A production-ready silicon microvalve

被引：8

作者：

Wang, TK ^{[1
]}

Barth, P ^{[1
]}

Alley, R ^{[1
]}

Baker, J ^{[1
]}

Yates, D ^{[1
]}

Field, L ^{[1
]}

Gordon, G ^{[1
]}

Beatty, C ^{[1
]}

Tully, L ^{[1
]}

机构：

[1] Little Falls Analyt Div, Wilmington, DE USA

来源：

MICROMACHINED DEVICES AND COMPONENTS V | 1999年 / 3876卷

关键词：

MEMS; proportional valve; bimetallic; actuator;

D O I：

10.1117/12.360498

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Micromachining is envisioned as an enabling technology for the miniaturization of chemical analysis systems. It has been pursued for gas phase analysis (GPA) in HP's Chemical Analysis Group and at HP Labs. A thermally actuated, silicon micromachined gas control valve has been jointly developed at HPL and Little Falls Analytical Division (LFAD) for use in a gas chromatograph. This microvalve has 1/10 the weight and 1/5 the package volume of competing solenoid valves. This low cost, high reliability, proportional gas control valve reduces the cost, weight and size of a crucial component for a gas chromatograph system. This paper discusses valve structure and performance, and the resolution of issues over the course of the development.

引用

页码：227 / 237

页数：11

共 50 条

[31] Total source mask optimization: high-capacity, resist modeling, and production-ready mask solution
Fakhry, Moutaz
Granik, Yuri
Adam, Kostas
Lai, Kafai
PHOTOMASK TECHNOLOGY 2011, 2011, 8166
[32] Building a Production-Ready Multi-Label Classifier for Legal Documents with Digital-Twin-Distiller
Csanyi, Gergely Mark
Vagi, Renato
Nagy, Daniel
Uveges, Istvan
Vadasz, Janos Pal
Megyeri, Andrea
Orosz, Tamas
APPLIED SCIENCES-BASEL, 2022, 12 (03):
[33] EQCCT: A Production-Ready Earthquake Detection and Phase-Picking Method Using the Compact Convolutional Transformer
Saad, Omar M.
Chen, Yunfeng
Siervo, Daniel
Zhang, Fangxue
Savvaidis, Alexandros
Huang, Guo-chin Dino
Igonin, Nadine
Fomel, Sergey
Chen, Yangkang
IEEE TRANSACTIONS ON GEOSCIENCE AND REMOTE SENSING, 2023, 61
[34] FABRICATION AND CHARACTERIZATION OF A SILICON MICROVALVE
EMMER, A
JANSSON, M
ROERAADE, J
LINDBERG, U
HOK, B
JOURNAL OF MICROCOLUMN SEPARATIONS, 1992, 4 (01) : 13 - 15
[35] Process and design of production-ready equipment for Cu line-pillar/low-k STP interconnect technology
Shishiguchi, S
Fukuda, T
Kochiya, H
Yanazawa, H
PROCEEDINGS OF THE IEEE 2002 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2002, : 36 - 38
[36] Electromagnetically driven microvalve fabricated in silicon
Meckes, A
Behrens, J
Benecke, W
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 821 - 824
[37] A hybrid PZT-silicon microvalve
Duggirala, R
Lal, A
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (03) : 488 - 497
[38] A SILICON MICROVALVE WITH COMBINED ELECTROMAGNETIC/ELECTROSTATIC ACTUATION
BOSCH, D
HEIMHOFER, B
MUCK, G
SEIDEL, H
THUMSER, U
WELSER, W
SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 : 684 - 692
[39] Additive Solution for Automotive Power Electronics: FKM manufactures series production-ready aluminum housings for SiC inverters using metal laser sintering
1600, John Wiley and Sons Inc (17): : 66 - 67
[40] Design and Fabrication of a Silicon Microvalve for Large Flow Application
Li, Yongjun
Deng, Ning
Huang, Xian
Zhang, Shengchang
2015 16TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY, 2015,

← 1 2 3 4 5 →