Rapid 3D μ-printing of polymer optical whispering-gallery mode resonators

被引：28
|
作者：
Wu, Jushuai [1 ]
Guo, Xin [1 ,2 ]
Zhang, A. Ping [1 ]
Tam, Hwa-Yaw [1 ]
机构：
[1] Hong Kong Polytech Univ, Dept Elect Engn, Photon Res Ctr, Kowloon, Hong Kong, Peoples R China
[2] Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China
来源：
OPTICS EXPRESS | 2015年 / 23卷 / 23期
关键词：
MICROCAVITY;
D O I：
10.1364/OE.23.029708
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A novel microfabrication method for rapid printing of polymer optical whispering-gallery mode (WGM) resonators is presented. A 3D micro-printing technology based on high-speed optical spatial modulator (SLM) and high-power UV light source is developed to fabricate suspended-disk WGM resonator array using SU-8 photoresist. The optical spectral responses of the fabricated polymer WGM resonators were measured with a biconically tapered optical fiber. Experimental results reveal that the demonstrated method is very flexible and time-saving for rapid fabrication of complex polymer WGM resonators. (C) 2015 Optical Society of America
引用
收藏
页码：29708 / 29714
页数：7
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