Characterization of TiN-Al2O3 multiple layers

被引：0

作者：

Arnold, B ^{[1
]}

Bartsch, K ^{[1
]}

Rennekamp, R ^{[1
]}

机构：

[1] INST FESTKORPER & WERKSTOFFORSCHUNG DRESDEN,D-01171 DRESDEN,GERMANY

来源：

EUROPEAN JOURNAL OF CELL BIOLOGY | 1997年 / 74卷

关键词：

D O I：

暂无

中图分类号：

Q2 [细胞生物学];

学科分类号：

071009 ; 090102 ;

摘要：

引用

页码：82 / 82

页数：1

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