Characterization of TiN-Al2O3 multiple layers

被引：0
|
作者：
Arnold, B [1 ]
Bartsch, K [1 ]
Rennekamp, R [1 ]
机构：
[1] INST FESTKORPER & WERKSTOFFORSCHUNG DRESDEN,D-01171 DRESDEN,GERMANY
来源：
EUROPEAN JOURNAL OF CELL BIOLOGY | 1997年 / 74卷
关键词：
D O I：
暂无
中图分类号：
Q2 [细胞生物学];
学科分类号：
071009 ; 090102 ;
摘要：
引用
收藏
页码：82 / 82
页数：1
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