Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India

被引：0

作者：

Aziz, T. ^{[1
]}

Chendvankar, S. R. ^{[1
]}

Mohanty, G. B. ^{[1
]}

Patil, M. R. ^{[1
]}

Rao, K. K. ^{[1
]}

Rani, Y. R. ^{[2
]}

Rao, Y. P. P. ^{[2
]}

Behnamian, H. ^{[3
,4
]}

Mersi, S. ^{[3
]}

Naseri, M. ^{[3
,4
]}

机构：

[1] Tata Inst Fundamental Res, Bombay 400005, Maharashtra, India

[2] Bharat Elect Ltd, Bangalore 560013, Karnataka, India

[3] European Org Nucl Res CERN, CH-1211 Geneva 23, Switzerland

[4] Inst Res Fundamental Sci IPM, Sch Particles & Accelerators, Tehran, Iran

来源：

JOURNAL OF INSTRUMENTATION | 2014年 / 9卷

关键词：

Particle tracking detectors; Si microstrip and pad detectors; Particle tracking detectors (Solid-state detectors); Detector design and construction technologies and materials;

D O I：

10.1088/1748-0221/9/06/P06008

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor on a four-inch wafer. After finding suitable test procedures for characterizing these AC coupled sensors, we fine-tuned various process parameters in order to produce sensors of the desired specifications.

引用

页数：10

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