Design, fabrication and characterization of the first AC-coupled silicon microstrip sensors in India

被引：0
|
作者：
Aziz, T. [1 ]
Chendvankar, S. R. [1 ]
Mohanty, G. B. [1 ]
Patil, M. R. [1 ]
Rao, K. K. [1 ]
Rani, Y. R. [2 ]
Rao, Y. P. P. [2 ]
Behnamian, H. [3 ,4 ]
Mersi, S. [3 ]
Naseri, M. [3 ,4 ]
机构：
[1] Tata Inst Fundamental Res, Bombay 400005, Maharashtra, India
[2] Bharat Elect Ltd, Bangalore 560013, Karnataka, India
[3] European Org Nucl Res CERN, CH-1211 Geneva 23, Switzerland
[4] Inst Res Fundamental Sci IPM, Sch Particles & Accelerators, Tehran, Iran
来源：
JOURNAL OF INSTRUMENTATION | 2014年 / 9卷
关键词：
Particle tracking detectors; Si microstrip and pad detectors; Particle tracking detectors (Solid-state detectors); Detector design and construction technologies and materials;
D O I：
10.1088/1748-0221/9/06/P06008
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper reports the design, fabrication and characterization of single-sided silicon microstrip sensors with integrated biasing resistors and coupling capacitors, produced for the first time in India. We have first developed a prototype sensor on a four-inch wafer. After finding suitable test procedures for characterizing these AC coupled sensors, we fine-tuned various process parameters in order to produce sensors of the desired specifications.
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页数：10
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