Deposition and microstructural characterization of MgO thin films by a spray pyrolysis method

被引：32
|
作者：
Xie, Y [1 ]
Wang, WZ [1 ]
Qian, YT [1 ]
Yang, L [1 ]
Chen, ZW [1 ]
机构：
[1] UNIV SCI & TECHNOL CHINA,STRUCT RES LAB,HEFEI 230026,PEOPLES R CHINA
来源：
SURFACE & COATINGS TECHNOLOGY | 1996年 / 82卷 / 03期
关键词：
magnesium acetylacetonate; MgO thin films; spray pyrolysis;
D O I：
10.1016/0257-8972(95)02762-9
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Thin films of MgO (150 nm) were deposited by a spray pyrolysis method. Ethanol-water solutions of magnesium acetylacetonate were ultrasonically nebulized and thermally decomposed on to Si(111) and NACl(100) in the temperature range 400-450 degrees C. The microstructure of as-deposited MgO thin films was studied by X-ray diffraction, scanning electron microscopy and transmission electron microscopy.
引用
收藏
页码：291 / 293
页数：3
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