Controlling the optical properties of nanostructured TiO2 thin films

被引:6
|
作者
Hawkeye, Matthew M. [1 ]
Brett, Michael J. [1 ,2 ]
机构
[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 2V4, Canada
[2] Natl Inst Nanotechnol, Edmonton, AB T6G 2M9, Canada
关键词
GLANCING-ANGLE DEPOSITION; REFRACTIVE-INDEXES; TITANIUM-OXIDE; GROWTH;
D O I
10.1002/pssa.200881297
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have studied the optical properties of nanostructured TiO2 films and demonstrated the ability to tune the refractive index of the material over a wide range. The nanostructured films are fabricated using glancing angle deposition, which provides the ability to precisely control the density of the deposited film. Film morphology was examined using scanning electron microscopy and the films were optically characterized by polarized-reflectance measurements. A simple isotropic homogeneous model, which is shown to be a good approximation of the film, is used to determine the optical constants from the reflectance measurements. Improvements to the model are suggested. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:940 / 943
页数:4
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