Development of low cost production technologies for polycrystalline silicon solar cells

被引：4

作者：

Machida, T ^{[1
]}

Miyazawa, A ^{[1
]}

Yokosawa, Y ^{[1
]}

Nakaya, H ^{[1
]}

Tanaka, S ^{[1
]}

Nunoi, T ^{[1
]}

Kumada, H ^{[1
]}

Murakami, M ^{[1
]}

Tomita, T ^{[1
]}

机构：

[1] SHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPAN

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1997年 / 48卷 / 1-4期

关键词：

production technologies; polycrystalline silicon; solar cells;

D O I：

10.1016/S0927-0248(97)00107-4

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

To develop a technology of forming grooves for low cost cell production, a multi-blade wheel grinding method was investigated. The process time of groove formation on the surface of 10 x 10 cm(2) polycrystalline silicon substrate was reduced to 30 s by a newly developed high-speed groove formation machine. Simultaneous formation of junction and anti-reflection coating by atmospheric pressure chemical vapor deposition (APCVD) technique was also investigated. For electrodes formation process, single firing method for both side electrodes made possible to simplify the firing process and to speed up from a conventional speed of 400 mm/min to 5000 mm/min.

引用

页码：243 / 253

页数：11

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