Intercalated multilayer graphene wires and metal/multilayer graphene hybrid wires obtained by annealing sputtered amorphous carbon

被引：25

作者：

Sato, Motonobu ^{[1
]}

Takahashi, Makoto ^{[1
]}

Nakano, Haruhisa ^{[1
]}

Takakuwa, Yuji ^{[2
]}

Nihei, Mizuhisa ^{[1
]}

Sato, Shintaro ^{[1
]}

Yokoyama, Naoki ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, GNC, Collaborat Res Team, Tsukuba, Ibaraki 3058569, Japan

[2] Tohoku Univ, Sendai, Miyagi 9808577, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2014年 / 53卷 / 04期

基金：

日本学术振兴会;

关键词：

GRAIN-BOUNDARIES; LARGE-AREA; FILMS; SILICON;

D O I：

10.7567/JJAP.53.04EB05

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have fabricated an intercalated multilayer graphene (i-MLG) wire and a cobalt metal/multilayer graphene (Co/MLG) hybrid wire with decreased resistivity relative to a multilayer graphene (MLG) wire by annealing sputtered amorphous carbon. The resistances of the i-MLG and Co/MLG wires decrease by 1 and 2 orders of magnitude relative to that of the MLG wire, respectively. The breakdown tests of the i-MLG and MLG wires indicate that the current tolerance per graphene layer remains almost the same, independent of whether the wires are intercalated. On the other hand, the Co/MLG hybrid wire exhibits not only decreased resistivity but also increased current tolerance. Moreover, with the optimization of the film thickness and annealing temperature, the obtained resistivities of Co/MLG, MLG, and i-MLG are 10, 80, and 6 mu Omega cm, respectively. (C) 2014 The Japan Society of Applied Physics

引用

页数：5

共 50 条

[21] Multilayer graphene/amorphous carbon hybrid films prepared by microwave surface-wave plasma CVD: synthesis and characterization
Ichimura, Susumu
Hayashi, Yasuhiko
Umeno, Masayoshi
SURFACE AND INTERFACE ANALYSIS, 2017, 49 (04) : 291 - 296
[22] Hybrid-functional electronic structure of multilayer graphene
Campetella, Marco
Nguyen Minh Nguyen
Baima, Jacopo
Maschio, Lorenzo
Mauri, Francesco
Calandra, Matteo
PHYSICAL REVIEW B, 2020, 101 (16)
[23] Phonon-interface scattering in multilayer graphene on an amorphous support
Sadeghi, Mir Mohammad
Jo, Insun
Shi, Li
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2013, 110 (41) : 16321 - 16326
[24] Highly Ordered Monolayer, Multilayer, and Hybrid Films of Graphene Oxide Obtained by the Bubble Deposition Method
Azevedo, Joel
Costa-Coquelard, Claire
Jegou, Pascale
Yu, Ting
Benattar, Jean-Jacques
JOURNAL OF PHYSICAL CHEMISTRY C, 2011, 115 (30): : 14678 - 14681
[25] Quasifreestanding multilayer graphene films on the carbon face of SiC
Siegel, D. A.
Hwang, C. G.
Fedorov, A. V.
Lanzara, A.
PHYSICAL REVIEW B, 2010, 81 (24)
[26] Proton energy loss in multilayer graphene and carbon nanotubes
Uribe, Juan D.
Mery, Mario
Fierro, Bernardo
Cardoso-Gil, Raul
Abril, Isabel
Garcia-Molina, Rafael
Valdes, Jorge E.
Esaulov, Vladimir A.
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2018, 173 (1-2): : 93 - 101
[27] Intercalated Multilayer Graphene with Ultra Low Resistance for Next-Generation Interconnects
Huang, Jian-Zhi
Chang, En-Cheng
Tsao, Po-Chou
Ni, I-Chih
Li, Shu-Wei
Chan, Yu-Chen
Yang, Shin-Yi
Lee, Ming-Han
Shue, Shau-Lin
Chen, Mei-Hsin
Wu, Chih-, I
ACS APPLIED NANO MATERIALS, 2023, 6 (12) : 10680 - 10686
[28] Annealing Effects after Nitrogen Ion Casting on Monolayer and Multilayer Graphene
Kim, Ki-jeong
Yang, Sena
Park, Youngchan
Lee, Myungjin
Kim, BongSoo
Lee, Hangil
JOURNAL OF PHYSICAL CHEMISTRY C, 2013, 117 (05): : 2129 - 2134
[29] Fabrication of Graphene Directly on SiO2 without Transfer Processes by Annealing Sputtered Amorphous Carbon
Sato, Motonobu
Inukai, Manabu
Ikenaga, Eiji
Muro, Takayuki
Ogawa, Shuichi
Takakuwa, Yuji
Nakano, Haruhisa
Kawabata, Akio
Nihei, Mizuhisa
Yokoyama, Naoki
JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (04)
[30] Free Vibration Response of a Multilayer Smart Hybrid Composite Plate with Embedded SMA Wires
Malekzadeh, K.
Mozafari, A.
Ghasemi, Faramarz Ashenai
LATIN AMERICAN JOURNAL OF SOLIDS AND STRUCTURES, 2014, 11 (02): : 279 - 298

← 1 2 3 4 5 →