Intercalated multilayer graphene wires and metal/multilayer graphene hybrid wires obtained by annealing sputtered amorphous carbon

被引:25
|
作者
Sato, Motonobu [1 ]
Takahashi, Makoto [1 ]
Nakano, Haruhisa [1 ]
Takakuwa, Yuji [2 ]
Nihei, Mizuhisa [1 ]
Sato, Shintaro [1 ]
Yokoyama, Naoki [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, GNC, Collaborat Res Team, Tsukuba, Ibaraki 3058569, Japan
[2] Tohoku Univ, Sendai, Miyagi 9808577, Japan
基金
日本学术振兴会;
关键词
GRAIN-BOUNDARIES; LARGE-AREA; FILMS; SILICON;
D O I
10.7567/JJAP.53.04EB05
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have fabricated an intercalated multilayer graphene (i-MLG) wire and a cobalt metal/multilayer graphene (Co/MLG) hybrid wire with decreased resistivity relative to a multilayer graphene (MLG) wire by annealing sputtered amorphous carbon. The resistances of the i-MLG and Co/MLG wires decrease by 1 and 2 orders of magnitude relative to that of the MLG wire, respectively. The breakdown tests of the i-MLG and MLG wires indicate that the current tolerance per graphene layer remains almost the same, independent of whether the wires are intercalated. On the other hand, the Co/MLG hybrid wire exhibits not only decreased resistivity but also increased current tolerance. Moreover, with the optimization of the film thickness and annealing temperature, the obtained resistivities of Co/MLG, MLG, and i-MLG are 10, 80, and 6 mu Omega cm, respectively. (C) 2014 The Japan Society of Applied Physics
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页数:5
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