A novel approach for determining pull-in voltages in micro-electro-mechanical systems (MEMS)

被引：0
|
作者：
Long, DS [1 ]
Shannon, MA [1 ]
Aluru, NR [1 ]
机构：
[1] Univ Illinois, Dept Mech Engn, Urbana, IL 61801 USA
来源：
2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年
关键词：
MEMS; Lagrange Multiplier Method; pull-in voltage; two-dimensional electrostatic analysis;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The sign of the lagrange multiplier will be the criterion used to identify when the conductors come into contact. The validity of this numerical approach is demonstrated by two simple examples along with comparison to previously published data.
引用
收藏
页码：481 / 484
页数：4
相关论文
共 50 条
  • [31] Modeling and simulation for electrostatically driven micro-electro-mechanical (MEMS) system
    Ha, T
    Kwon, O
    Kim, J
    Oh, J
    Won, T
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S676 - S680
  • [32] Special issue on electroceramics in micro-electro-mechanical systems
    Setter, N
    JOURNAL OF ELECTROCERAMICS, 2004, 12 (1-2) : 5 - 6
  • [33] Thermodynamic reversible transformations in micro-electro-mechanical systems
    Igor Neri
    Miquel López-Suárez
    The European Physical Journal B, 2018, 91
  • [34] Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications
    Gauthier, RC
    Tait, RN
    Ubriaco, M
    APPLIED OPTICS, 2002, 41 (12) : 2361 - 2367
  • [35] Special micro-electro-mechanical systems pressure sensor
    Jiang, Zhuangde
    Tian, Bian
    Zhao, Yulong
    Zhao, Libo
    Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2013, 49 (06): : 187 - 197
  • [36] Micro-electro-mechanical systems (MEMS)-based micro-scale direct methanol fuel cell development
    Yao, SC
    Tang, XD
    Hsieh, CC
    Alyousef, Y
    Vladimer, M
    Fedder, GK
    Amon, CH
    ENERGY, 2006, 31 (05) : 636 - 649
  • [37] Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications
    Gauthier, Robert C.
    Niall Tait, R.
    Ubriaco, Mike
    Applied Optics, 2002, 41 (12): : 2361 - 2367
  • [38] Analysis of electro-statically driven micro-electro-mechanical systems
    Cho, CD
    Lee, B
    FRACTURE AND STRENGTH OF SOLIDS VI, PTS 1 AND 2, 2006, 306-308 : 1247 - 1252
  • [39] A novel dynamic pull-in MEMS gyroscope
    Sharma, Mrigank
    Sarraf, Elie H.
    Cretu, Edmond
    EUROSENSORS XXV, 2011, 25
  • [40] A web-enabled open database system for design and manufacturing of micro-electro-mechanical systems (MEMS)
    Xuan F. Zha
    The International Journal of Advanced Manufacturing Technology, 2007, 32 : 378 - 392
12345