A novel approach for determining pull-in voltages in micro-electro-mechanical systems (MEMS)

被引：0
|
作者：
Long, DS [1 ]
Shannon, MA [1 ]
Aluru, NR [1 ]
机构：
[1] Univ Illinois, Dept Mech Engn, Urbana, IL 61801 USA
来源：
2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年
关键词：
MEMS; Lagrange Multiplier Method; pull-in voltage; two-dimensional electrostatic analysis;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The sign of the lagrange multiplier will be the criterion used to identify when the conductors come into contact. The validity of this numerical approach is demonstrated by two simple examples along with comparison to previously published data.
引用
收藏
页码：481 / 484
页数：4
相关论文
共 50 条
  • [1] A Novel Approach for Micro-electro-mechanical System(MEMS) Vacuum Packaging
    WANG Cheng-gang
    International Journal of Plant Engineering and Management, 2008, (03) : 148 - 153
  • [2] MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) MICRO-HEATER
    Janakos, C. N.
    Goericke, F. T.
    Pisano, A. P.
    INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B, 2013, : 881 - 886
  • [3] Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)
    De Pasquale, Giorgio
    MICROMACHINES, 2021, 12 (11)
  • [4] Presentation highlights: Micro-Electro-Mechanical Systems (MEMS)
    Okandan, M
    JOURNAL OF REHABILITATION RESEARCH AND DEVELOPMENT, 2002, 39 (03): : 3 - 4
  • [5] Wafer bonding for micro-electro-mechanical systems (MEMS)
    Colinge, CA
    PERSPECTIVES, SCIENCE AND TECHNOLOGIES FOR NOVEL SILICON ON INSULATOR DEVICES, 2000, 73 : 269 - 280
  • [6] Design for reliability of micro-electro-mechanical systems (MEMS)
    McCluskey, P
    52ND ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, 2002 PROCEEDINGS, 2002, : 760 - 762
  • [7] Micro-rotor dynamics for micro-electro-mechanical systems (MEMS)
    Meng, Guang
    Zhang, Wen-Ming
    Huang, Hai
    Li, Hong-Guang
    Chen, Di
    CHAOS SOLITONS & FRACTALS, 2009, 40 (02) : 538 - 562
  • [8] Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review
    Faudzi, Ahmad Athif Mohd
    Sabzehmeidani, Yaser
    Suzumori, Koichi
    JOURNAL OF ROBOTICS AND MECHATRONICS, 2020, 32 (02) : 281 - 288
  • [9] Assembly and characterization of optical MEMS (Micro-Electro-Mechanical Systems)
    Khalil, D
    Morshed, AH
    THIRD WORKSHOP ON PHOTONICS AND ITS APPLICATION AT EGYPTIAN ENGINEERING FACULTIES & INSTITUTES, 2002, : 111 - 116
  • [10] Dynamic pull-in and oscillations of current-carrying filaments in magnetic micro-electro-mechanical system
    Skrzypacz, Piotr
    Ellis, Grant
    He, Ji-Huan
    He, Chun-Hui
    COMMUNICATIONS IN NONLINEAR SCIENCE AND NUMERICAL SIMULATION, 2022, 109
12345