High temperature stable acoustic surface wave substrates of SiO2/LiNbO3 structure with super high coupling

被引：41
|
作者：
Yamanouchi, K [1 ]
Ishii, T [1 ]
机构：
[1] Tohoku Inst Technol, Taihaku Ku, Sendai, Miyagi 9828577, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 5B期
关键词：
surface acoustic wave; SiO2/LiNbO3; substrate; high coupling; zero TCF; wide band SAW filter;
D O I：
10.1143/JJAP.41.3480
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this study, in order to improve the temperature coefficient of frequency (TCF), the propagation characteristics of SiO2/Rotated Y-cut, X-propagating LiNbO3 leaky surface acoustic wave (SAW) substrates with a large electromechanical Coupling coefficient (k(2)), zero attenuation and zero TCF are theoretically investigated. The results showed a large k(2) of more than 0.2 (zero k(2) of Rayleigh mode), zero TCF and zero propagation attenuation for leaky SAW in the case of a short boundary at a thin film thickness of H/lambda (.)=. 0.15-0.25 (H: SiO2 film thickness, lambda: SAW wavelength). The experimental results agreed with the theoretical ones.
引用
收藏
页码：3480 / 3482
页数：3
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