Coated optics for DUV-excimer laser applications

Recent developments of DUV-excimer laser applications have gained in demands for radiation resistant coated components at interesting wavelengths. To meet the requirements of long term reliability and high pulse number throughput superior performance of the optical components with lowest absorption and scattering losses are necessary. In the framework of the German Joint Research Project OPUS II efforts are made to investigate the optical properties, the radiation resistance and long term stability of single layers and layer systems of interest in the DUV. The evaluation of optical coatings and coating systems (AR and HR) on different substrate materials was carried out by scattering experiments, atomic force microscopy, infrared spectroscopy, calorimetric absorption measurements, and determination of laser induced damage threshold (1-on-1, 1000-on-1). Additionally from the spectralphotometric measurements the optical behaviour of the films was examined.