Characteristic Analysis of Gas Detection Basing on Metal Oxide Semiconductor Sensor

被引:1
|
作者
Xu, Dingjun [1 ]
Zhang, Zhengyong [1 ]
机构
[1] Chinese Acad Sci, Inst Intelligent Machines, Hefei, Peoples R China
关键词
Semiconductor sensor; Logarithm model; Response curve; Error analysis; SELECTIVITY; MIXTURE; SENSITIVITY; IMPROVEMENT; MODEL;
D O I
10.1109/ICIMA.2009.5156560
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper analyzes gas detection characteristic of the metal oxide semiconductor sensor, and puts forward the logarithm model of detecting single gas basing on our experiment data, also we infer the analysis formula model of detecting mixture gas fetched from the single gas detection model. We compare the error of our model with the errors of some models proposed by other researchers, and also we propose some points for attention in the practical application.
引用
收藏
页码:61 / 64
页数:4
相关论文
共 50 条
  • [41] Selective CO detection by using indium oxide-based semiconductor gas sensor
    Yamaura, H
    Tamaki, J
    Moriya, K
    Miura, N
    Yamazoe, N
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1996, 143 (02) : L36 - L37
  • [42] Metal Oxide Semiconductor Based Thin Film Sensor for Nitro Aromatic Explosive Detection
    Sagar, Mathure
    Mudhalwadkar, Rohini
    Sonar, Gaurav
    2014 INTERNATIONAL CONFERENCE FOR CONVERGENCE OF TECHNOLOGY (I2CT), 2014,
  • [43] High resolution electron bombareded complementary metal oxide semiconductor sensor for ultraviolet detection
    Liu Hu-Lin
    Wang Xing
    Tian Jin-Shou
    Sai Xiao-Feng
    Wei Yong-Lin
    Wen Wen-Long
    Wang Jun-Feng
    Xu Xiang-Yan
    Wang Chao
    Lu Yu
    He Kai
    Chen Ping
    Xin Li-Wei
    ACTA PHYSICA SINICA, 2018, 67 (01)
  • [44] Semiconductor metal oxide gas sensors: A review
    Dey, Ananya
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2018, 229 : 206 - 217
  • [45] FTIR analysis of the mechanisms of NOx detection by semiconductor metal oxide nanoparticles
    Baraton, MI
    Merhari, L
    SEMICONDUCTOR MATERIALS FOR SENSING, 2005, 828 : 191 - 196
  • [46] A selective methane gas sensor based on metal oxide semiconductor equipped with an on-chip microfilter
    Wu, Ruijie
    Tian, Liang
    Li, Hao
    Liu, Huabin
    Luo, Jiaxin
    Tian, Xuemin
    Hua, Zhongqiu
    Wu, Yi
    Fan, Shurui
    SENSORS AND ACTUATORS B-CHEMICAL, 2022, 359
  • [47] Temperature feedback control for improving the stability of a semiconductor-metal-oxide (SMO) gas sensor
    Gong, JW
    Chen, QF
    Lian, MR
    Liu, NC
    Daoust, C
    IEEE SENSORS JOURNAL, 2006, 6 (01) : 139 - 145
  • [48] Selectivity and Sensitivity Property of Metal Oxide Semiconductor Based Gas Sensor with Dopants Variation: A Review
    Patial, Payal
    Deshwal, Manish
    TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, 2022, 23 (01) : 6 - 18
  • [49] Selectivity and Sensitivity Property of Metal Oxide Semiconductor Based Gas Sensor with Dopants Variation: A Review
    Payal Patial
    Manish Deshwal
    Transactions on Electrical and Electronic Materials, 2022, 23 : 6 - 18
  • [50] METAL OXIDE NANOSTRUCTURE-BASED GAS SENSOR FOR CARBON DIOXIDE DETECTION
    Gerbreders, V.
    Krasovska, M.
    Mihailova, I.
    Kostjukevics, J.
    Sledevskis, E.
    Ogurcovs, A.
    Gerbreders, A.
    Bulanovs, A.
    LATVIAN JOURNAL OF PHYSICS AND TECHNICAL SCIENCES, 2021, 58 (05) : 15 - 26