Velocity distribution function of sputtered Cu atoms obtained by time resolved optical absorption spectroscopy

被引：10
|
作者：
Kang, Namjun [1 ,2 ]
Oh, Soo-ghee [3 ]
Gaboriau, Freddy [1 ,2 ]
Ricard, Andre [1 ,2 ]
机构：
[1] Univ Toulouse, UPS, INPT, LAPLACE Lab Plasma & Convers Energie, F-31062 Toulouse 9, France
[2] CNRS, LAPLACE, F-31062 Toulouse, France
[3] Ajou Univ, Div Energy Syst Res, Suwon 443749, South Korea
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2010年 / 81卷 / 01期
关键词：
copper; discharges (electric); plasma density; plasma diagnostics; plasma-wall interactions; sputtering; time resolved spectra; LASER-INDUCED FLUORESCENCE; OF-FLIGHT; MAGNETRON DISCHARGE; ENERGY-DISTRIBUTIONS; COPPER ATOMS; THERMALIZATION; PLASMA; IONS; TEMPERATURE; BOMBARDMENT;
D O I：
10.1063/1.3284528
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A new method based on time resolved optical absorption spectroscopy is proposed to determine the velocity distribution function of sputtered Cu atoms in a magnetron plasma discharge. The method consists of applying a short pulse of 1.5 mu s and of recording time variations in copper atom density in off pulse at different positions (1, 2, and 3 cm) from target surface under 3-30 mTorr. The time evolution of the density is then converted into velocity distribution. We estimate that only sputtered atoms with radial velocity component lower than 0.5 km/s are detected. The average velocity of Cu atoms is evaluated as the first order moment of the velocity distribution functions. The velocity distribution functions become the more dispersive the farther from target surface. The average velocities vary in the range of 2.5-3 km/s at the vicinity of target surface whereas at 3 cm a decrease from 2.5 to 1.2 km/s is observed at 30 mTorr.
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页数：5
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