Plasma-chemical reactor based on a low-pressure pulsed arc discharge for synthesis of nanopowders

被引:27
|
作者
Karpov, I. V. [1 ,3 ]
Ushakov, A. V. [1 ,3 ]
Lepeshev, A. A. [1 ,2 ]
Fedorov, L. Yu. [1 ]
机构
[1] Siberian Fed Univ, Svobodnyi Pr 79, Krasnoyarsk 660041, Russia
[2] Russian Acad Sci, Siberian Branch, Krasnoyarsk Res Ctr, Krasnoyarsk 660036, Russia
[3] Reshetnev Siberian Aerosp State Univ, Pr Krasnoyarskii Rabochii 31, Krasnoyarsk 660123, Russia
关键词
OXYGEN CONCENTRATION; CRYSTALLINE PHASES; NANOPARTICLES; FEATURES;
D O I
10.1134/S106378421701011X
中图分类号
O59 [应用物理学];
学科分类号
摘要
A reactor for producing nanopowders in the plasma of a low-pressure arc discharge has been developed. As a plasma source, a pulsed cold-cathode arc evaporator has been applied. The design and operating principle of the reactor have been described. Experimental data on how the movement of a gaseous mixture in the reactor influences the properties of nanopowders have been presented.
引用
收藏
页码:168 / 173
页数:6
相关论文
共 50 条
  • [41] Low-pressure high-current pulsed magnetron discharge with electron injection from a vacuum arc plasma emitter
    Shandrikov, M. V.
    Cherkasov, A. A.
    Oks, E. M.
    Vizir, A. V.
    Zolotukhin, D. B.
    VACUUM, 2024, 219
  • [42] The component content of active particles in a plasma-chemical reactor based on volume barrier discharge
    Soloshenko, I. A.
    Tsiolko, V. V.
    Pogulay, S. S.
    Terent'yeva, A. G.
    Bazhenov, V. Yu
    Shchedrin, A. I.
    Ryabtsev, A. V.
    Kuzmichev, A. I.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2007, 16 (01): : 56 - 66
  • [43] STUDY OF A HIGHLY IONIZED LOW-PRESSURE ARGON PLASMA GENERATED IN A PULSED DISCHARGE
    JOLLY, J
    REVUE DE PHYSIQUE APPLIQUEE, 1977, 12 (04): : 553 - 558
  • [44] Semiemprical Estimate of the Temperature of the Medium in the Corona Discharge of a Plasma-Chemical Reactor
    E. A. Bogoslov
    M. P. Danilaev
    S. V. Drobyshev
    V. A. Kuklin
    Journal of Engineering Physics and Thermophysics, 2020, 93 : 1591 - 1597
  • [45] Titanium nitride plasma-chemical synthesis with titanium tetrachloride raw material in the DC plasma-arc reactor
    Kirpichev, D. E.
    Sinaiskiy, M. A.
    Samokhin, A. V.
    Alexeev, N. V.
    14TH HIGH-TECH PLASMA PROCESSES CONFERENCE (HTPP 14), 2017, 825
  • [47] A COMPARISON OF LOW-PRESSURE ARC AND LOW-PRESSURE PLASMA SPRAYED TITANIUM COATINGS
    STEFFENS, HD
    ERTURK, E
    BUSSE, KH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06): : 2459 - 2463
  • [48] Effect of HF discharge structure on etch nonuniformity in plasma-chemical reactor
    Grigor'Ev Yu.N.
    Gorobchuk A.G.
    Russian Microelectronics, 1600, Maik Nauka Publishing / Springer SBM (43): : 34 - 41
  • [49] SEMIEMPRICAL ESTIMATE OF THE TEMPERATURE OF THE MEDIUM IN THE CORONA DISCHARGE OF A PLASMA-CHEMICAL REACTOR
    Bogoslov, E. A.
    Danilaev, M. P.
    Drobyshev, S. V.
    Kuklin, V. A.
    JOURNAL OF ENGINEERING PHYSICS AND THERMOPHYSICS, 2020, 93 (06) : 1591 - 1597
  • [50] On the Mechanisms of Symmetry Breaking in Plasma-Chemical High-Frequency Low-Pressure Capacitive Reactors
    S. A. Dvinin
    Z. A. Kodirzoda
    O. A. Sinkevich
    D. K. Solikhov
    High Energy Chemistry, 2023, 57 : S28 - S31