Dual laser fabrication of planar lightwave circuits

被引：0
|
作者：
Kashyap, Raman [1 ,2 ]
Treanton, Vincent [1 ,2 ]
Celebi-Ozcan, Lutfu [2 ]
Martinu, Ludvik [1 ,2 ]
机构：
[1] Ecole Polytech, Dept Elect Engn, PolyGrames Res Ctr, Montreal, PQ H3C 3A7, Canada
[2] Ecole Polytech Montreal, Dept Engn Phys, Montreal, PQ H3C 3A7, Canada
来源：
PHOTONICS NORTH 2006, PTS 1 AND 2 | 2006年 / 6343卷
基金：
加拿大自然科学与工程研究理事会;
关键词：
laser machining; optical waveguides; micro fluidics; PLC's;
D O I：
10.1117/12.708271
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents recent scheme based of direct dual wavelength laser writing of lightwave circuits developed in our laboratories. The system allows the fabrication of features of the order of similar to 1 micron by using a short wavelength laser to ablate a region preheated by a second laser.
引用
收藏
页数：6
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