High pressure sensor with PZT transducer in LTCC package

被引：10

作者：

Dabrowski, Arkadiusz P. ^{[1
]}

Golonka, Leszek J. ^{[1
]}

机构：

[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, Wybrzeze Wyspianskiego 27, PL-50370 Wroclaw, Poland

来源：

28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) | 2014年 / 87卷

关键词：

pressure sensor; LTCC; PZT; piezoelectricity; ceramic sensor;

D O I：

10.1016/j.proeng.2014.11.356

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Design, technology and properties of a completely ceramic piezoelectric pressure sensor are described. The sensor is made of the LTCC (Low Temperature Co-fired Ceramics) with PZT (Lead Zirconate Titanate) transducer and is designed to withstand pressure up to 10 MPa. The device is a sensor and a package simultaneously. It can be directly screw mounted to a flat surface with a hole supplying a pressure. Two methods of detection are considered: shift of the resonant frequency for static loads detection and charge response for dynamically changing load. Measurements are carried out for maximum 6 MPa pressure. The sensor exhibits linear charge response and resonant frequency shift in tested range. (C) 2014 Published by Elsevier Ltd.

引用

页码：1099 / 1102

页数：4

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