High pressure sensor with PZT transducer in LTCC package

被引：10

作者：

Dabrowski, Arkadiusz P. ^{[1
]}

Golonka, Leszek J. ^{[1
]}

机构：

[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, Wybrzeze Wyspianskiego 27, PL-50370 Wroclaw, Poland

来源：

28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) | 2014年 / 87卷

关键词：

pressure sensor; LTCC; PZT; piezoelectricity; ceramic sensor;

D O I：

10.1016/j.proeng.2014.11.356

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Design, technology and properties of a completely ceramic piezoelectric pressure sensor are described. The sensor is made of the LTCC (Low Temperature Co-fired Ceramics) with PZT (Lead Zirconate Titanate) transducer and is designed to withstand pressure up to 10 MPa. The device is a sensor and a package simultaneously. It can be directly screw mounted to a flat surface with a hole supplying a pressure. Two methods of detection are considered: shift of the resonant frequency for static loads detection and charge response for dynamically changing load. Measurements are carried out for maximum 6 MPa pressure. The sensor exhibits linear charge response and resonant frequency shift in tested range. (C) 2014 Published by Elsevier Ltd.

引用

页码：1099 / 1102

页数：4

共 50 条

[1] LTCC/PZT accelerometer in SMD package
Dabrowski, Arkadiusz
Elkjaer, Karl
Borregaard, Louise
Zawada, Tomasz
Golonka, Leszek
MICROELECTRONICS INTERNATIONAL, 2014, 31 (03) : 186 - 192
[2] LTCC/PZT Differential Pressure Sensor Utilizing Ultrasonic Wave Resonator
Dabrowski, Arkadiusz P.
Golonka, Leszek J.
PROCEEDINGS OF THE 2014 37TH INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE) - ADVANCES IN ELECTRONIC SYSTEM INTEGRATION, 2014, : 397 - 403
[3] An Application of PZT Thick Films on LTCC Substrates: A Case Study of a Resonant Pressure Sensor
Zarnik, M. S.
Belavic, D.
Macek, S.
Kosec, M.
2008 17TH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, 2008, : 407 - +
[4] High temperature LTCC package for SiC-based gas sensor
Nowak, Damian
Kulczak, Dariusz
Januszkiewicz, Maksymilian
Dziedzic, Andrzej
OPTICA APPLICATA, 2009, 39 (04) : 701 - 704
[5] QUARTZ PRESSURE TRANSDUCER PACKAGE
OBRIEN, JF
WASLEY, RJ
REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (04): : 531 - &
[6] LTCC package for high temperature applications
Nowak, Damian
Dziedzic, Andrzej
MICROELECTRONICS RELIABILITY, 2011, 51 (07) : 1241 - 1244
[7] PZT acoustic wave force sensor made in LTCC technology
Dabrowski, A.
Golonka, L. J.
2013 EUROPEAN MICROELECTRONICS PACKAGING CONFERENCE (EMPC), 2013,
[8] Novel Packaged LTCC/PZT Modules for Actuator and Sensor Applications
Floessel, M.
Gebhardt, S.
Schoenecker, A.
Michaelis, A.
ACTUATOR 10, CONFERENCE PROCEEDINGS, 2010, : 586 - +
[9] High temperature characteristic for wireless pressure LTCC-based sensor
Tan Qiulin
Kang Hao
Qin Li
Xiong Jijun
Liu Jun
Xue Chenyang
Zhang Wendong
Luo Tao
Microsystem Technologies, 2015, 21 : 209 - 214
[10] High temperature characteristic for wireless pressure LTCC-based sensor
Tan Qiulin
Kang Hao
Qin Li
Xiong Jijun
Liu Jun
Xue Chenyang
Zhang Wendong
Luo Tao
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 21 (01): : 209 - 214

← 1 2 3 4 5 →