A comprehensive tutorial on the pulsed laser deposition technique and developments in the fabrication of low dimensional systems and nanostructures

被引:27
|
作者
Bin Masood, Khalid [1 ]
Kumar, Pushpendra [2 ]
Malik, Mushtaq Ahmad [3 ]
Singh, Jai [4 ]
机构
[1] Dr Harisingh Gour Cent Univ, Dept Phys, Sagar 470003, India
[2] CSIR Natl Chem Lab, Phys & Mat Chem Div, Pune 411008, Maharashtra, India
[3] Govt Degree Coll Pulwama, Dept Chem, Pulwama 192301, Jammu & Kashmir, India
[4] Guru Ghasidas Univ, Dept Pure & Appl Phys, Bilaspur 495009, CG, India
关键词
PLD; Thin films; ZnO; Graphene; MoS2; WS2; THIN-FILM DEPOSITION; FEW-LAYER GRAPHENE; EPITAXIAL-GROWTH; ZNO NANORODS; OXIDE SUPERCONDUCTOR; SURFACE-MORPHOLOGY; OXYGEN-PRESSURE; TITANATE FILMS; SIZE CONTROL; HIGH-QUALITY;
D O I
10.1007/s42247-020-00155-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Pulsed laser deposition (PLD) is a simple and extremely versatile technique to grow thin films and nanomaterials of a wide variety of materials. PLD allows the deposition of profoundly different materials, including high-temperature superconductors, oxides, nitrides, carbides, semiconductors, metals, and even polymers or fullerenes with high deposition rates. Growing thin films using PLD is now being used around the world for prototyping thin films of many inorganic materials and even in device fabrication protocols. This article covers the detailed development, versatility, and reliability of the ultraviolet (UV) excimer laser. It is envisioned that this review article is of interest for both the materials and chemical scientists engaged in more fundamental aspects of pulsed laser ablation and deposition. The present article highlights the historical developments of PLD technique, complete mechanism of thin film fabrication, optimization of the quality of thin films and the fabrication of thin films of the materials like ZnO, Graphene, MoS2, and WS2 which are being explored for various potential applications.
引用
收藏
页码:737 / 754
页数:18
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