Fabrication of stress-induced SrRuO3 nanostructures by pulsed laser deposition

被引：7
|
作者：
Vasco, E
Dittmann, R
Karthäuser, S
Waser, R
机构：
[1] Forschungszentrum Julich, Inst Festkorperforsch, D-52425 Julich, Germany
[2] Forschungszentrum Julich, Ctr Nanoelect Syst Informat Technol, D-52425 Julich, Germany
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2004年 / 79卷 / 4-6期
关键词：
D O I：
10.1007/s00339-004-2811-y
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The compressive stress originated in the coherent epitaxial-SrRuO3/LaAlO3 interface has been used as a nano-patterning tool for the creation of island and wire arrays in ultrathin (<20 nm) SrRuO3 films. The nanostructure, stoichiometry, and electrical properties of these arrays have been studied by X-ray diffraction, atomic force microscopy, Rutherford back-scattering spectroscopy and resistivity vs temperature measurements. The influence of the shadowing effect produced by the non-perpendicular incidence of the evaporated particles on the array morphology is discussed.
引用
收藏
页码：1461 / 1464
页数：4
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