Fabrication of stress-induced SrRuO3 nanostructures by pulsed laser deposition

被引:7
|
作者
Vasco, E
Dittmann, R
Karthäuser, S
Waser, R
机构
[1] Forschungszentrum Julich, Inst Festkorperforsch, D-52425 Julich, Germany
[2] Forschungszentrum Julich, Ctr Nanoelect Syst Informat Technol, D-52425 Julich, Germany
来源
关键词
D O I
10.1007/s00339-004-2811-y
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The compressive stress originated in the coherent epitaxial-SrRuO3/LaAlO3 interface has been used as a nano-patterning tool for the creation of island and wire arrays in ultrathin (<20 nm) SrRuO3 films. The nanostructure, stoichiometry, and electrical properties of these arrays have been studied by X-ray diffraction, atomic force microscopy, Rutherford back-scattering spectroscopy and resistivity vs temperature measurements. The influence of the shadowing effect produced by the non-perpendicular incidence of the evaporated particles on the array morphology is discussed.
引用
收藏
页码:1461 / 1464
页数:4
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