DESIGN OF POWER-OPTIMIZED THERMAL CANTILEVERS FOR SCANNING PROBE TOPOGRAPHY SENSING

被引：15
|
作者：
Rothuizen, H. [1 ]
Despont, M. [1 ]
Drechsler, U. [1 ]
Hagleitner, C. [1 ]
Sebastian, A. [1 ]
Wiesmann, D. [1 ]
机构：
[1] IBM Res Corp, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland
来源：
IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年
关键词：
FORCE MICROSCOPE CANTILEVERS; DATA-STORAGE; EXPERIMENTAL IDENTIFICATION; HEATERS; DYNAMICS; SENSORS;
D O I：
10.1109/MEMSYS.2009.4805454
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports on design optimization of cantilever-based thermal topography sensors using finite-element simulations, their fabrication and characterization. Measurements demonstrate vertical distance sensitivities Delta RIR of 2x10(-4) nm(-1) , yielding sub-angstrom resolution at bandwidths of several tens of kHz and at powers on the order of 1 mW.
引用
收藏
页码：603 / 606
页数：4
相关论文
共 30 条
  • [21] Design and implementation of optimized dispatching software system for unit load in thermal power plant
    College of Electric Power, South China Univ. of Tech., Guangzhou 510640, China
    Huanan Ligong Daxue Xuebao, 2006, 6 (112-116):
  • [22] Electrical Parasitics and Thermal Modeling for Optimized Layout Design of High Power SiC Modules
    Bahman, Amir Sajjad
    Blaabjerg, Frede
    Dutta, Atanu
    Mantooth, Alan
    APEC 2016 31ST ANNUAL IEEE APPLIED POWER ELECTRONICS CONFERENCE AND EXPOSITION, 2016, : 3012 - 3019
  • [23] Plasmonic nanograting tip design for high power throughput near-field scanning aperture probe
    Wang, Yuyan
    Huang, Yu-Yen
    Zhang, Xiaojing
    OPTICS EXPRESS, 2010, 18 (13): : 14004 - 14011
  • [24] Optimized Design and Operation Control of Refrigerant Direct Cooling Thermal Management System for Power Battery
    Zhou, Yibin
    Tang, Aikun
    Wang, Zhentao
    Yang, Peng
    ENERGY TECHNOLOGY, 2024, 12 (08)
  • [25] Cascaded subarray design and control method for power efficient, thermal crosstalk optimized optical phased array
    Wang, Wuxiucheng
    Lu, Lejie
    King, Lydia
    Liu, Yongchao
    Gong, Ming
    Li, Shuangyang
    Wu, Hui
    OPTICS EXPRESS, 2023, 31 (23) : 37381 - 37394
  • [26] Optimized Design and Thermal/Electrical Characterization Analysis of Automotive Power Semiconductor Switch Modules Using an Inlay PCB
    Park, Jaehyun
    Yim, Changjong
    Yim, Hyewon
    Park, Jongmin
    Park, Shihong
    2016 IEEE INTERNATIONAL CONFERENCE ON CONSUMER ELECTRONICS-ASIA (ICCE-ASIA), 2016,
  • [27] Miniaturized Design of a Piezoelectric Thermal Sensor optimized for the Integration to Wide Bandgap Power Modules operating at High Temperatures
    Kim, Min-Ki
    Yoon, Sang Won
    2017 THIRTY SECOND ANNUAL IEEE APPLIED POWER ELECTRONICS CONFERENCE AND EXPOSITION (APEC), 2017, : 767 - 771
  • [28] Design and Fabrication by Thermal Imprint Lithography and Mechanical Characterization of a Ring-Based PDMS Soft Probe for Sensing and Actuating Forces in Biological Systems
    Dattoma, Tommaso
    Qualtieri, Antonio
    Epifani, Gianmichele
    De Vittorio, Massimo
    Rizzi, Francesco
    POLYMERS, 2019, 11 (03)
  • [29] Design of GA Optimized Fuzzy Logic-based PID Controller for the Two Area Non-Reheat Thermal Power System
    Azadani, Hooman Nasr
    Torkzadeh, Roozbeh
    2013 13TH IRANIAN CONFERENCE ON FUZZY SYSTEMS (IFSC), 2013,
  • [30] Improving frequency regulation ability for a wind-thermal power system by multi-objective optimized sliding mode control design
    Li, Xuehan
    Wang, Wei
    Ye, Lingling
    Ren, Guorui
    Fang, Fang
    Liu, Jizhen
    Chen, Zhe
    Zhou, Qiang
    ENERGY, 2024, 300
123