Operating characteristics of a glow plasma discharge at atmospheric pressure

被引:0
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作者
Sugimoto, S
Norikane, S
Takehara, A
Goto, S
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T [工业技术];
学科分类号
08 ;
摘要
A discharge system generating a stable glow plasma at atmospheric pressure has been investigated experimentally. We have developed a simple discharge system with parallel plate electrodes and a high voltage switching power supply, considering low-cost and large area application. The developed discharge system and some measured basic operating characteristics will be shown.
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页码:1826 / 1829
页数:4
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