Optical waveguiding properties into porous gallium nitride structures investigated by prism coupling technique

被引:11
|
作者
Alshehri, Bandar [1 ]
Lee, Seung-Min [2 ]
Kang, Jin-Ho [2 ]
Gong, Su-Hyun [3 ]
Ryu, Sang-Wan [2 ]
Cho, Yong-Hoon [3 ]
Dogheche, Elhadj [1 ]
机构
[1] Univ Valenciennes, CNRS, IEMN, Villeneuve Dascq, France
[2] Chonnam Natl Univ, Dept Phys, Kwangju 500757, South Korea
[3] Korea Adv Inst Sci & Technol, Dept Phys & KI NanoCentury, Taejon 305701, South Korea
关键词
NANOPOROUS GAN; FILMS;
D O I
10.1063/1.4892528
中图分类号
O59 [应用物理学];
学科分类号
摘要
In order to modulate the refractive index and the birefringence of Gallium Nitride (GaN), we have developed a chemical etching method to perform porous structures. The aim of this research is to demonstrate that optical properties of GaN can be tuned by controlling the pores density. GaN films are prepared on sapphire by metal organic chemical vapor deposition and the microstructure is characterized by transmission electron microscopy, and scanning electron microscope analysis. Optical waveguide experiment is demonstrated here to determine the key properties as the ordinary (n(0)) and extraordinary (n(e)) refractive indices of etched structures. We report here the dispersion of refractive index for porous GaN and compare it to the bulk material. We observe that the refractive index decreases when the porous density p is increased: results obtained at 0.975 mu m have shown that the ordinary index n(0) is 2.293 for a bulk layer and n(0) is 2.285 for a pores density of 20%. This value corresponds to GaN layer with a pore size of 30 nm and inter-distance of 100 nm. The control of the refractive index into GaN is therefore fundamental for the design of active and passive optical devices. (C) 2014 AIP Publishing LLC.
引用
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页数:4
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