Determination of optical properties of amorphous and crystalline thin films by spectroellipsometry

被引：1
|
作者：
Yamaguchi, T
Jayatissa, AH
Aoyama, M
Tabe, M
机构：
[1] Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku
来源：
APPLIED SURFACE SCIENCE | 1997年 / 113卷
关键词：
SIMOX; amorphous; dielectric function; spectroellipsometry;
D O I：
10.1016/S0169-4332(96)00891-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Determination of optical properties of amorphous and crystalline thin films by spectroellipsometry (SE) is discussed. The SE data of SIMOX wafers were analyzed using optical constants of SiO2 and Si and considering a thickness fluctuation in the buried SiO2 layer. From the analysis of data with model dielectric functions, it has been shown that the use of optical constants of bulk-Si for top-Si layer of SIMOX is suitable. It has also been demonstrated that the previously proposed empirical dielectric function [J. Appl. Phys. 77 (1995) 4673] is very useful in the interpretation of optical properties of amorphous materials.
引用
收藏
页码：493 / 498
页数：6
相关论文
共 50 条
  • [31] Optical Properties of Amorphous and Crystalline GeTe Nanoparticle Thin Films: A Phase-Change Material for Tunable Photonics
    Michel, Ann-Katrin U.
    Sousa, Marilyne
    Yarema, Maksym
    Yarema, Olesya
    Ovuka, Vladimir
    Lassaline, Nolan
    Wood, Vanessa
    Norris, David J.
    ACS APPLIED NANO MATERIALS, 2020, 3 (05) : 4314 - 4320
  • [32] TEMPERATURE DEPENDENCE OF THE STRUCTURAL AND OPTICAL PROPERTIES OF THE AMORPHOUS-TO-CRYSTALLINE TRANSITION IN AgSbSe2 THIN FILMS
    Hamam, M.
    El-Gendy, Y. A.
    Selim, M. S.
    Teleb, N. H.
    Salem, A. M.
    CHALCOGENIDE LETTERS, 2009, 6 (08): : 359 - 365
  • [33] Optical properties of sputtered amorphous beryllium nitride thin films
    Khoshman, J.M.
    Khan, A.
    Kordesch, M.E.
    Journal of Applied Physics, 2007, 101 (10):
  • [34] Optical properties of sputtered amorphous beryllium nitride thin films
    Khoshman, J. M.
    Khan, A.
    Kordesch, M. E.
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (10)
  • [35] Study of the optical properties of amorphous As–Se–S thin films
    Kamal A. Aly
    H. H. Hegazy
    A. Dahshan
    Kh. S. Shaaban
    Y. Saddeek
    S. R. Alharbi
    Atif Mossad Ali
    S. A. Amin
    Applied Physics A, 2018, 124
  • [36] Optical properties of Se80Te20 thin films during amorphous-crystalline transition
    Sudha, A
    Raghavan, KS
    Vaya, PR
    PROCESSING AND FABRICATION OF ADVANCED MATERIALS V, 1996, : 535 - 542
  • [37] Understanding terahertz optical properties of amorphous carbon thin films
    Wang, H.
    Guo, J. Q.
    Zhou, Y. S.
    CARBON, 2013, 64 : 67 - 71
  • [38] Some optical properties of amorphous In-Se thin films
    Michalewicz, A.
    Jarzabek, B.
    Cisowski, J.
    Jurusik, J.
    Burian, A.M.
    Weszka, J.
    Electron Technology (Warsaw), 1998, 31 (3-4): : 411 - 416
  • [39] Preparation and tunable optical properties of amorphous AlSiO thin films
    Magnusson, Roger
    Paul, Biplab
    Eklund, Per
    Greczynski, Grzegorz
    Birch, Jens
    Jonson, Bo
    Ali, Sharafat
    VACUUM, 2021, 187
  • [40] OPTICAL AND STRUCTURAL PROPERTIES OF AMORPHOUS ANTIMONY THIN-FILMS
    SHKLYARE.IN
    USOSKIN, AI
    OPTICS AND SPECTROSCOPY-USSR, 1971, 31 (04): : 328 - &
12345