Nano Particle Porous Alumina Based Thin Film Parallel Plate Capacitive Humidity Sensor

被引：2
|
作者：
Kumar, Shailesh [1 ]
机构：
[1] Thapar Univ, Dept Elect & Instrumentat Engn, Patiala 147004, Punjab, India
来源：
SOLID STATE PHYSICS: PROCEEDINGS OF THE 58TH DAE SOLID STATE PHYSICS SYMPOSIUM 2013, PTS A & B | 2014年 / 1591卷
关键词：
sol-gel process; porous alumina; parallel electrode; dip-coating; capacitive sensor;
D O I：
10.1063/1.4872672
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A Relative humidity sensor was fabricated based on porous thin film of gamma-Al2O3 formed between the parallel Pd/Ag electrodes working on capacitive technique. The film was fabricated by dip coating of sol solution obtained from the sol-gel method. The electrical parameters of the sensor have been determined by Agilent 4294A impedance analyzer. The sensor so obtained is found to be sensitive in 10 to 90% RH. The response time of the sensor is very low around 24 seconds and recovery time 40 seconds.
引用
收藏
页码：555 / 557
页数：3
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