Effects of spatial sensitivity on mass sensing with bulk acoustic mode resonators

被引：11
|
作者：
Zielinski, Arthur T. [1 ]
Prasad, Abhinav [2 ]
Seshia, Ashwin A. [2 ]
Kalberer, Markus [1 ]
Jones, Roderic L. [1 ]
机构：
[1] Univ Cambridge, Dept Chem, Ctr Atmospher Sci, Cambridge CB2 1EW, England
[2] Univ Cambridge, Dept Engn, Nanosci Ctr, Cambridge CB3 0FF, England
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2015年 / 236卷
基金：
加拿大自然科学与工程研究理事会;
关键词：
Spatial sensitivity; Bulk Acoustic Wave (BAW); Bulk Acoustic Mode Resonator; Particulate Mass Sensor; MEMS; Mathematical modelling; AIR-POLLUTION;
D O I：
10.1016/j.sna.2015.11.003
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The spatial sensitivity of bulk acoustic mode resonators can influence calibrations when they are implemented as accurate mass sensors of surface-bound particles. A new spatial sensitivity model based on images of the resonator surface is introduced from early principles. The adsorption of particles was studied empirically by repeatedly drying particle laden droplets on the surface of two 3.14 MHz bulk acoustic mode resonators. Theoretical and experimental results were compared to identify three scenarios over the course of consecutive droplet evaporation with varying spatial sensitivity influences. Examining different surface treatments for the resonators revealed the hydrophilic surface to have a higher rate of particle stacking and conglomeration (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：369 / 379
页数：11
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