Assembly and Packaging Technologies for High-Temperature and High-Power GaN Devices

被引:62
|
作者
Bajwa, Adeel Ahmad [1 ]
Qin, Yangyang [2 ]
Reiner, Richard [3 ]
Quay, Ruediger [3 ]
Wilde, Juergen [1 ]
机构
[1] Univ Freiburg, Inst Mikrosyst Tech, Lab Assembly & Packaging Technol, D-79110 Freiburg, Germany
[2] Micro Syst Engn GmbH, D-95180 Berg, Germany
[3] Fraunhofer Inst Appl Solid State Phys, D-79108 Freiburg, Germany
关键词
GaN high-electron-mobility transistors (HEMTs); passive and active cycling; silver sintering; transient liquid phase (TLP) bonding; TRANSIENT LIQUID-PHASE; DIE ATTACH MATERIALS; MECHANICAL-PROPERTIES; ELECTRONICS; SILVER; INTERMETALLICS; TRANSISTORS; SAPPHIRE; SOLDER; HEMT;
D O I
10.1109/TCPMT.2015.2468595
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper gives a detailed analysis on the assembly and packaging technologies for the state-of-the-art GaN-based high-electron-mobility transistors, which are suitable for high-temperature and high-power applications. Silver sintering and transient liquid phase bonding were selected as die-attachment techniques, and gold and palladium were investigated for electrical interconnection materials. Both the die-attachments were characterized for their high-temperature stability up to 450 degrees C. Systematic electrical characterizations were performed from on-wafer measurements to the final assembly. The thermal and thermomechanical influences of the assembly were assessed. For die-attachments and interconnections, passive temperature shock cycling and active power cycling were performed as an initial attempt to characterize the assembly reliability. Finally, a complete package along with the base plate was proposed, which can survive high temperatures up to 480 degrees C.
引用
收藏
页码:1402 / 1416
页数:15
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