共 50 条
- [41] Secondary ion formation during electronic and nuclear sputtering of germanium NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2018, 424 : 1 - 9
- [46] FORMATION OF THIN DIELECTRIC AND CONDUCTING FILMS BY THE ION-BEAM SPUTTERING METHOD PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, 1992, 18 (17): : 72 - 75