WIDEBAND AIR-COUPLED PZT PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER THROUGH DC BIAS TUNING

被引：0

作者：

Kusano, Yuri ^{[1
]}

Wang, Qi ^{[1
]}

Rudy, Ryan Q. ^{[2
]}

Polcawich, Ronald G. ^{[2
]}

Horsley, David A. ^{[1
]}

机构：

[1] Univ Calif Davis, Davis, CA 95616 USA

[2] US Army Res Lab, Adelphi, MD USA

来源：

30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017) | 2017年

关键词：

OPTIMIZATION;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Wide bandwidth for an air-coupled piezoelectric micromachined transducer (PMUT) is important to achieve short pulse transmission and reception in pulse-echo imaging with high axial resolution. Here, we report experimental results on an air-coupled PMUT with high displacement sensitivity up to 5500 nm/V, high 3 dB bandwidth of 20.3 kHz, and correspondingly short transmission time of 0.05 ms, achieved through dc bias tuning. The dc bias controls the polarization and intrinsic stress of the piezoelectric layer, tuning frequencies of two closely spaced resonance modes of the ribbon-shaped PMUT. The modes nearly overlapped when applying small dc bias around +/- 5 V, enabling wideband and short pulse transmission.

引用

页码：1204 / 1207

页数：4

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