Dielectric properties of sol-gel derived Pb(Zr0.70Ti0.30)O3/PbTiO3 and Pb(Zr0.70Ti0.30)O3/BaTiO3 multilayer thin films

Pb(Zr(0.70)Ti(0.30))O(3) (PZT)/PbTiO(3) (PT) and Pb(Zr(0.70)Ti(0.30))O(3)(PZT)/ BaTiO(3) (BT) multilayer films were prepared on Pt/Ti/SiO(2)/Si substrates using metallorganic sol-gel processing. The effect of the thickness of BT or PT layers on microstructure and dielectric and ferroelectric properties are studied. An appreciable increase in the breakdown field strength (E(B)), decrease in coercive field (E(C)) and leakage current (I(L)), and great improvements in the fatigue behavior with increasing number of BT or PT layers, are observed. The improvements of dielectric and ferroelectric properties of PZT/BT and PZT/PT multilayer films indicated the important role of BT or PT interlayer for PZT capacitors. Furthermore the relationship between microstructure and dielectric properties is also discussed.