Cast epoxy-based microfluidic systems and their application in biotechnology

被引:26
|
作者
Sethu, P [1 ]
Mastrangelo, CH [1 ]
机构
[1] Univ Michigan, Ctr Wireless Integrated Microsyst, Ann Arbor, MI 48109 USA
来源
SENSORS AND ACTUATORS B-CHEMICAL | 2004年 / 98卷 / 2-3期
关键词
epoxy casting; microfluidics; BioMEMS; microfabrication; plastic micromachming; polymers;
D O I
10.1016/j.snb.2003.09.036
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This paper reports the development of epoxy microcasting technologies for the fabrication of plastic microfluidic platforms. Two new techniques one involving embedding active silicon devices in plastic microsystems using a polymer flip chip process and another involving surface micromachining to build active components like actuators for use in applications like pumping are discussed and explained. Application devices were fabricated for polymerase chain reaction (PCR) and capillary electrophoresis (CE). (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:337 / 346
页数:10
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