Synthesis of carbon nanoparticles by microwave plasma chemical vapor deposition and their field emission properties

被引:3
|
作者
Yu, J [1 ]
Zhang, Q [1 ]
Ahn, J [1 ]
Yoon, SF [1 ]
Rusli [1 ]
Li, YJ [1 ]
Gan, B [1 ]
Chew, K [1 ]
机构
[1] Nanyang Technol Univ, Ctr Microelect, Singapore 639798, Singapore
关键词
D O I
10.1023/A:1015456921100
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Carbon nanoparticles (CNPs) were prepared by microwave plasma assisted chemical vapor deposition (MWCVD) using iron films as the catalysts. The size of the CNPs range from several tens of nanometer to over 200 nm. Raman analysis indicates that the CNPs have graphitic structure. Field emission measurements show that the emission current density of the carbon nanoparticles reaches 0.04 A/m2 at 1.0 V/μm and 11 A/m2 at 3.6 V/μm. The emission site density is uniform on most of the emission area.
引用
收藏
页码:543 / 545
页数:3
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