Effects of Annealing Temperature on Magnetic Properties of Co Thin Films on Si (100)

被引：3
|
作者：
Wang, Kai [1 ]
Zhao, Yue [1 ]
Li, Guojian [1 ]
Wu, Chun [1 ]
Wang, Qiang [1 ]
He, Jicheng [1 ]
机构：
[1] Northeastern Univ, Key Lab Electromagnet Proc Mat, Minist Educ, Shenyang 110819, Peoples R China
来源：
IEEE TRANSACTIONS ON MAGNETICS | 2015年 / 51卷 / 11期
基金：
中国国家自然科学基金;
关键词：
Co silicide; magnetic properties; surface structure; thin films; SILICIDE FORMATION; SI(100); FIELD; DIFFUSION; BEHAVIOR;
D O I：
10.1109/TMAG.2015.2427296
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The effects of silicide formation on the surface structure and magnetic properties of Co thin films on Si (100) were investigated. Annealing temperature significantly changed the formation of silicide. CoSi phase was formed during annealing at 600 degrees C and 700 degrees C. CoSi2 phase was formed during annealing at 800 degrees C. The anisotropy of Co/Si (100) films changed due to the formation of silicide. In addition, both the particle size and the surface roughness increased with the increase of annealing temperature, which led to the increase of coercivity up to 700 degrees C. However, the better crystallinity HC decreased at 800 degrees C.
引用
收藏
页数：4
相关论文
共 50 条
  • [21] The effects of annealing temperature and sputtering power on the structure and magnetic properties of the Co-Fe-Zr-B thin films
    Chen, Guo-Ju
    Jian, Sheng-Rui
    Jang, Jason Shian-Ching
    Shih, Yung-Hui
    Chen, Yuan-Tsung
    Jen, Shien-Uang
    Juang, Jenh-Yih
    INTERMETALLICS, 2012, 30 : 127 - 131
  • [22] Effects of annealing temperature on the properties of GaN films on Si substrates
    Wu, Yuxin
    Xue, Chengshan
    Zhuang, Huizhao
    Tian, Deheng
    Liu, Yi'an
    He, Jianting
    Ai, Yujie
    Sun, Lili
    Wang, Fuxue
    Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics, 2007, 27 (04): : 472 - 475
  • [23] Annealing Temperature Effect on the Properties of CoCe Thin Films Prepared by Magnetron Sputtering at Si(100) and Glass Substrates
    Lin, Shih-Hung
    Chang, Yung-Huang
    Huang, Yu-Jie
    Chen, Yuan-Tsung
    Dong, Shu-Huan
    Processes, 2024, 12 (12)
  • [24] Interfacial and annealing effects on magnetic properties of CoFeB thin films
    Wang, Yung-Hung
    Chen, Wei-Chuan
    Yang, Shan-Yi
    Shen, Kuei-Hung
    Park, Chando
    Kao, Ming-Jer
    Tsai, Ming-Jinn
    Journal of Applied Physics, 2006, 99 (08):
  • [25] Interfacial and annealing effects on magnetic properties of CoFeB thin films
    Wang, Yung-Hung
    Chen, Wei-Chuan
    Yang, Shan-Yi
    Shen, Kuei-Hung
    Park, Chando
    Kao, Ming-Jer
    Tsai, Ming-Jinn
    JOURNAL OF APPLIED PHYSICS, 2006, 99 (08)
  • [26] Magnetic and electrical properties of Co/Si multilayer thin films
    Grundy, PJ
    Fallon, JM
    Blythe, HJ
    PHYSICAL REVIEW B, 2000, 62 (14) : 9566 - 9574
  • [27] Morphology and magnetic properties of Co thin films electrodeposited on Si
    Munford, ML
    Sartorelli, ML
    Seligman, L
    Pasa, AA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (05) : C274 - C279
  • [28] Effects of annealing on the magnetic properties and structures of sputtered Co-Pt alloy thin films
    Yamamoto, Tomoo
    Tezuka, Tetsuya
    Nishimaki, Makio
    Ishiguro, Takashi
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1998, 37 (11): : 5980 - 5983
  • [29] Effects of annealing on the magnetic properties and structures of sputtered Co-Pt alloy thin films
    Yamamoto, T
    Tezuka, T
    Nishimaki, M
    Ishiguro, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (11): : 5980 - 5983
  • [30] Investigation of annealing effects on the structural, magnetic and transport properties of Co/GaAs(001) thin films
    Sharma, A.
    Tripathi, S.
    Brajpuriya, R.
    Chaudhari, S. M.
    APPLIED SURFACE SCIENCE, 2006, 252 (24) : 8571 - 8575
12345