Pulsed laser deposition of metallic multilayers: the influence of laser power on microstructure

被引：5
|
作者：
Al-Busaidy, MS
Kusmartseva, OE
Crapper, MD [1 ]
机构：
[1] Loughborough Univ Technol, Dept Phys, Loughborough LE11 3TU, Leics, England
[2] Sultan Qaboos Univ, Coll Sci, Dept Phys, Al Khoud 123, Oman
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2004年 / 79卷 / 4-6期
关键词：
D O I：
10.1007/s00339-004-2809-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Multilayers of Co and Cu on Si(111) substrates have been produced by pulsed laser deposition at the second harmonic of a Nd:YAG laser (532 nm). The effect of varying the laser power on the film microstructure has been investigated using grazing incidence X-ray reflectivity measurements. Quantitative analysis of the reflectivity curves indicates that higher laser powers are associated with greater intermixing at the Co/Cu interfaces. Offset scans indicate that there is conformal roughness. The deposition process introduces some droplets into the layers, principally of Cu.
引用
收藏
页码：1453 / 1456
页数：4
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